Welcome to the Canvas information page for the course

Advanced Processing of Nanostructures, 7.5 credits

given by the Department of Physics.

Please note: This page contains only general information about the course. It does not contain any course material. If you are a student on the course you have to log in to the Canvas portal in the site navigation to find the courses of your programme.

Contents

The aim of the course is that you have acquired in-depth knowledge in the fabrication and characterization of nanoscale devices, intended for use in nanoelectronics as well as in the life sciences. In the course, we will focus on modern material and process techniques currently used in nanotechnology, such as electron beam lithography, scanning electron microscopy, etching. In the laboratory part of the course, you will have access to a modern cleanroom to make structures and devices using the various process techniques mentioned above.

Since you will be working with nanometer-scale structures in a clean and dust-free environment, working methods and safety issues in cleanrooms are important elements of the course.

The course consists of three main parts:

The introductory lectures will review different methods of nanofabrication such as electron beam lithography, focused ion beams, nanoimprint, self-assembly, soft lithography and others. The aim of the lectures is to introduce students to the subject of advanced nanofabrication and to guide them how to organize self-studies in an efficient way. The number of lectures is limited to 4 (totally 8 hours) and some time will be reserved at the lectures to discuss the material and get the feedback from the students. The study material for studies will be distributed among the students, it will include the recommended textbooks and suitable scientific review articles.
Prior to the laboratory exercises a special cleanroom and safety training will be organized for the students to provide them with a special knowledge about the correct behavior in the research cleanrooms of Lund Nano Lab and how to deal with chemicals and equipment in the lab. The laboratory exercises will be divided into three parts (cleanroom behavior and practical handling of samples and chemicals, nanoimprint and scanning electron microscopy and electron beam lithography) to give the students some essential "hand-on" knowledge of the safe work habits in Lund Nano Lab. These exercises will be performed in smaller groups (maximum 3 persons per groups) in order to be able to learn practical things efficiently.
As a final and the biggest part of the course, course projects will be offered in order to deepen practical knowledge of the cleanroom work and learn advanced equipment and techniques. The course project will take 4-6 weeks and will focus on a specific research area, relevant to the research activity of the Division of Solid State Physics. Totally 3-4 course projects will be offered during the course. Actual duration of the project will depend on its complexity and will be adjusted accordingly. The project work will be supervised by PhD-students and/or the staff of the Lund Nano Lab. Regular communication and discussions with the students about the project work will be organized in order to monitor the project implementation. At the end of the project work a mini-conference with public presentation of the results will be organized.

The course is given by the Faculty of Engineering (LTH) and follows the LTH study period and examination schedule.

General information

Course codes: FYST60 (Science faculty), FFFN01 (LTH), FFFN01F (PhD)
Semester: autumn and spring
Study pace: 25%, given during the entire semester
Level: second cycle
Language: English
Forms of teaching: lectures, laboratory sessions and project work
Assessment: written examination, approval of laboratory exercises and approval of project work

Syllabus

Read the syllabi on Lund University's central website:

Course literature

Lecture notes and review articles (to be distributed during the course)
Zheng Cui: Nanofabrication, Principles, capabilities and limits. Springer, 2017, ISBN: 978-3-319-39359-9, 978-3-319-39361-2 (eBook)
W. Whyte: Cleanroom Technology, Fundamentals of Design, Testing and Operation. John Wiley and sons, 2001, ISBN: 0 471 86842 6

Course coordinator

Ivan Maximov, ivan.maximov@ftf.lth.se

Schedule

The schedule for the course can be found on the schedule software TimeEdit:

Application

Science faculty

Apply to the course at Antagning.se.

Click below links to Lund University's central website, where you will also find the entry requirements and more information about the course:

Please note! To see if the course is open for application, please visit the Swedish website.

LTH

Apply for the course via Course application at LTH.

Please check the syllabus for entry requirements.

Doctoral studies

Sign up for the course by contacting course responsible and studentadministration@fysik.lu.se.

Remember that you need to have the course listed in your individual study plan, ISP, or approved by your supervisor to have it counted towards your exam.

Read more

Do you have questions? Please contact us at studentadministration@fysik.lu.se